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Mass Flow Controller

Mass Flow Controller

Product Details:

  • Temperature 70 Celsius (oC)
  • Gas Pressure 3 mpa
  • Port Size 3mm, 6mm, 8mm, 15mm
  • Application All Gases for flow measurement and control
  • Power Supply 15-24 VDC
  • Machine Weight 3 Kilograms (kg)
  • Supply Ability : 50 Piece Per Month
45000 INR/Piece
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Price And Quantity

  • 35000.00 - 70000.00 INR/Piece
  • 45000 INR/Piece
  • 1 Piece

Product Specifications

  • 3 Kilograms (kg)
  • 70 Celsius (oC)
  • 3 mpa
  • 3mm, 6mm, 8mm, 15mm
  • All Gases for flow measurement and control
  • 15-24 VDC

Trade Information

  • Mumbai
  • Telegraphic Transfer (T/T), Letter of Credit (L/C), Cheque, Cash in Advance (CID)
  • 50 Piece Per Month
  • 8 Week
  • Contact us for information regarding our sample policy
  • Africa, Middle East, Asia
  • All India

Product Description

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas.They play an important role in scientific research and production in various fields such assemiconductors and integrated circuit industries, special materials disciplines, chemical industry,and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applicationsinclude: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching,sputtering, and ion implantation; and coating equipment, optical fiber smelting, micro reactiondevices, mixed gas distribution systems, capillary measurement, Gas chromatographs and otheranalytical instruments


Flow range

(0-5,10,20,30,50,100,200,300,500)SCCM;(0-1,2,3,5,10,20,30,50,100)SLM

Accuracy

1%FS of gas mass flow controller

Linearity

0.5%FS

Repeatability

0.2%FS of gas flow meter

Responding time

Less than 1s

Pressure difference

(0.05 to 0.3)MPa

Max.Pressure

3MPa

Working temperature

5-65 of gas mass flow controller

Input/output

Digital:RS232/RS485

Power Supply

Analog: 0-5vdc or 4-20mA

Weight

7-16vdc,1A of gas flow meter


HYKO TECHNOLOGIES

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